Trade fair highlight 24. April 2024
Vacuum systems with IBAD, IBS, PECVD technologies
ORTUS
ION BEAM ASSISTED DEPOSITION (IBAD) SYSTEM
ORTUS is a family of coaters based on electron beam evaporation technology with ion assistance. From the compact sized Ortus 700 up to the largest Ortus 1500 our ORTUS coater portfolio can be configurated with a variety of options needed to produce high density IAD under a stable environment. Our self-developed fully automated optical monitoring system, OCP SingleWave and OCP BroadBand, enable real-time optimization of optical coating process and designs and provide automation of complex filters coatings at highest accuracy and repeatability.
LIDIZ
ION BEAM SPUTTERING (IBS) SYSTEM FOR ULTRA-HIGH PRECISION OPTICS
LIDIZ vacuum systems family is the result and embodiment of 50 years’ experience in Ion Beam Sputtering (IBS) technology. IBS technology is well known for its extremely low-loss optical coatings. LIDIZ IBS system is an effective tool for deposition of optical coatings for a wide range of applications. LIDIZ is equipped with RF grid ion beam sputtering source, RF grid ion beam source for substrates pre cleaning, surface activation, sputtering assisting and RF neutralizers.
DIAMANTA
VACUUM SYSTEM WITH PECVD TECHNOLOGY
DIAMANTA vacuum system is intended for deposition of wear resistant diamond-like carbon (DLC) coatings on silicon and germanium substrates. DLC coatings are anti-reflective in IR range in 3-5 µm and 7-14 µm. The method of deposition is chemical deposition of carbon from the gas phase stimulated by plasma of ion beam source.
ION BEAM ASSISTED DEPOSITION (IBAD) SYSTEM
ORTUS is a family of coaters based on electron beam evaporation technology with ion assistance. From the compact sized Ortus 700 up to the largest Ortus 1500 our ORTUS coater portfolio can be configurated with a variety of options needed to produce high density IAD under a stable environment. Our self-developed fully automated optical monitoring system, OCP SingleWave and OCP BroadBand, enable real-time optimization of optical coating process and designs and provide automation of complex filters coatings at highest accuracy and repeatability.
LIDIZ
ION BEAM SPUTTERING (IBS) SYSTEM FOR ULTRA-HIGH PRECISION OPTICS
LIDIZ vacuum systems family is the result and embodiment of 50 years’ experience in Ion Beam Sputtering (IBS) technology. IBS technology is well known for its extremely low-loss optical coatings. LIDIZ IBS system is an effective tool for deposition of optical coatings for a wide range of applications. LIDIZ is equipped with RF grid ion beam sputtering source, RF grid ion beam source for substrates pre cleaning, surface activation, sputtering assisting and RF neutralizers.
DIAMANTA
VACUUM SYSTEM WITH PECVD TECHNOLOGY
DIAMANTA vacuum system is intended for deposition of wear resistant diamond-like carbon (DLC) coatings on silicon and germanium substrates. DLC coatings are anti-reflective in IR range in 3-5 µm and 7-14 µm. The method of deposition is chemical deposition of carbon from the gas phase stimulated by plasma of ion beam source.
I-Photonics
Contact
Mr. Vitali Khomich